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[Analysis Case] Evaluation of Organic Contamination of Wafers in Wafer Cases

You can evaluate the causes and total amount of organic contamination in the manufacturing process.

It is known that the adsorption of organic substances on the wafer surface can lead to various issues, such as the degradation of gate oxide film breakdown voltage. Therefore, as the miniaturization and high integration of semiconductor devices progress, it has become increasingly important to monitor not only inorganic substances but also trace amounts of organic substances. Here, we present a case where silicon wafers were stored in two types of wafer cases, and the organic contamination components adhered to the entire wafer surface were concentrated using a wafer analyzer and evaluated using GC/MS.

• Company：一般財団法人材料科学技術振興財団　MST
• Price：Other

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